A next-generation lithography technology using a range of extreme ultraviolet (EUV) wavelengths. Recently technological updates in EUV Lithography include Multiple patterning, Atomic Layer Deposition (ALD), and Pellicle and Dubbed High NA which enhances the quality and resolves all the background problems. Major market players like canon, ASML, Samsung, Intel, and many others are already working on EUV Lithography.
This Interactive dashboard will provide you with an analysis of “EUV Lithogrpahy” technology by automatically classifying patents using the taxonomy bot (Ontologier).
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